Products - PI (Physik Instrumente) L.P.
Video: Voice Coil Stage for Metrology and Fast Focus Control: Semiconductor Surface Metrology, Laser Processing, Microscopy
The video explains operation and applications of PI’s new V-308 voice coil nano-focus stage for surface metrology, laser processing, super resolution microscopy, and bio-technology, where very fast focus control with nanometer resolution is critical. There are several ways to achieve fast and accurate focus control: Piezoelectric actuators provide very high precision and speed over short travel ranges. Voice coil motors are based on electrodynamic principles and allow longer travel ranges, while maintaining high precision and speed. Controlling the Z-focus with high accuracy in the nanometer range is a critical enabling technology for next generation semiconductor surface metrology, high precision laser control, optical and super-resolution microscopy, and genome sequencing.
PI manufactures custom voice coil motors for use in their high performance motion and positioning product lines and for OEMs with very special demands that cannot be met off-the-shelf voice coil motors.
PI voice coil stages provide high performance positioning in a compact package. Single and XY stage combinations are available. In general, voice coil driven linear stages are used in positioning applications where high speed, high acceleration or high accuracy is required.
