These high resolution piezo-Z stages, piezo tip-tilt stages, and Z-tip-tilt platforms use flexure guides and frictionless motion amplifiers to provide extended motion ranges along with excellent guiding precision. Piezo-motor stages for even longer travel ranges are also available.
Piezo stages with flexures can achieve linear resolutions down to sub-nanometers and rotary resolutions down to the nanoradian realm.
Piezo wafer stages are critical for semiconductor manufacturing and metrology applications due to their high resolution, bandwidth and stability.
Applications include fast autofocus, interferometry, image scanning, super-resolution microscopy, semiconductor metrology.
PIHera Piezo-Z Nanopositioner
Compact, Direct Metrology
- 50 to 400µm Z-axis motion
- <1 Nanometer resolution
- Frictionless precision flexure guides
- Direct capacitive metrology
- X, XY, Z, XYZ combinations
P-611 Piezo Nanopositioning Stage
Compact, Low Cost
- 100µm motion range
- For cost-sensitive applications
- Small footprint: 44x44mm
- <1 nanometer resolution
- Z, XZ, XY, XYZ options
Compact Z/Tip/Tilt Steering Mirror Platforms
For Mirrors from ½” to 4”
- 1 to 3 axis
- Very high dynamics
- Up to 70mrad deflection
- Sub-µrad resolution
P-612 Piezo-Z Stage
Compact Elevation Stage, Aperture
- 100µm Z motion
- Compact: 60x60x27mm
- For cost-sensitive applications
- <1 nanometer resolution
P-733.Z High Dynamics Piezo-Z Stage
Direct Metrology, Clear Aperture
- 100µm Z motion
- 0.3nm resolution
- Direct capacitive metrology
- High stiffness for fast response
- 50x50mm aperture
P-528 Piezo-Z & Z/Tip/Tilt Stages
Parallel Metrology
- 50, 100, 200µm Z-motion
- Up to 4 milliradian Z/tip/tilt
- Precision trajectory control
- Sub-nanometer resolution
- Parallel capacitive metrology
A-523 Z-Tip-Tilt Air Bearing Stage
Low Profile
- ⌀250mm table
- 8 kg load capacity
- 5mm Z-stroke, to 2° tip/tilt
- 10nm/0.06µrad incremental motion
- 1nm sensor resolution
P-736 Piezo-Z Scanner, w/Controller
For Microscope Slides
- 200µm vertical motion
- 1nm resolution
- Fast step & settle, from 5msec
- Low profile: 20mm (0.8")
- Controller & software included
P-736 Piezo-Z Scanner, w/Controller
For Multi Well-Plates
- 220µm vertical motion
- 1nm resolution
- Fast step & settle, from 5msec
- Low profile: 20mm (0.8")
- Controller & software included
P-737 Piezo Z-Stage
For Microscopy & Biotech
- 100, 250, 500µm motion
- 2-5 nanometer resolution
- Millisecond response
- Aperture for specimen holders
- Integrates with motorized XY stages
N-725 PIFOC® Fast Piezo Nano Focus
2mm, PiezoWalk® Motor
- 2000µm motion
- PiezoWalk® motor, self-locking
- Package with controller
- Millisecond settling time
- 0.5nm sensor resolution
P-725 High Performance Piezo Focus Scanner
Up to 800µm, Sub-Nanometer Precision
- 100, 400, 800µm motion
- Combines higher dynamics & longer travel
- Millisecond responsiveness
- Ideal for autofocus, metrology, pathology
- New high performance controller
P-726 PIFOC® Fast Piezo Nano Focus
100µm, High-Stiffness, High End
- 100µm motion
- Ultra-stiff for heavy objectives
- Millisecond settling time
- Enhanced focus stability
- Compatible with imaging software
With the use of flexures mechanisms, the motion of a piezo stack can be multiplied many times to achieve up to one millimeter travel (or more in extreme cases). The flexures can be used as guide and preload mechanism at the time. Flexure motion is based on the elastic deformation (flexing) of a solid material. Friction and stiction are entirely eliminated, and flexures exhibit high stiffness, load capacity, and resistance to shock and vibration. Flexures are maintenance free and not subject to wear. They are vacuum compatible, operate over a wide temperature range, and require neither lubricants nor compressed air for operation.