XY piezo stages provide highly precise linear motion in 2 axes (2-DOF). 2-axis piezo stages can be designed in several ways. Wire EDM (Electric Discharge Machining) cut flexures provide the best guiding accuracy. For the highest performance and optimized dynamics, a monolithic planar design (single module) with parallel kinematics and parallel metrology position feedback is recommended. Stacked or nested 2-axis, X-Y stage designs are also available – they trade the flexibility of modularity with the added inertia/height and lower dynamic performance.
Frictionless XY-Motion with Nanometer Precision
Due to the frictionless design of drive system (solid-state piezo stack actuators), sensors, and the flexure-based guiding system, PI piezo nanopositioning stages can provide sub-nanometer positioning resolution. Most of PI's XY piezo stages are equipped with an ID chip that contains calibration data for the digital piezo controller, allowing stage and controller to be swapped in the field without the need for recalibration. The latest generation of digital piezo motion controllers, also further enhances the bandwidth, linearity, and the position stability as well as step-and-settle times.
The PIHera 2-axis XY product family comes in many sizes and travel ranges up to 1800µm. In addition to single axis and 2-axis XY versions, Z stages are available that can be combined to form 3-axis linear XYZ stage combinations. PIHera stages are available with capacitive position feedback for the highest linearity and stability.
The P-611 is an economical XY stage with strain gauge sensors and 100µm travel.
PIHera Compact XY Piezo Stages
Direct Capacitive Metrology
- 50 to 1800µm XY-motion
- <1 nanometer resolution
- Frictionless precision flexure guides
- Capacitive feedback
- X, XY, Z, XYZ combinations
P-611 Compact XY Piezo Stage
100µm, Affordable System
- 100x100µm motion
- 1 nanometer resolution
- Compact footprint: 44x44mm
- Strain gauge feedback
- XZ and XYZ version also available
These XY stages with apertures are designed to facilitate optical applications. Stages with direct-drives provide higher dynamics, but limited travel ranges. Integrated flexure motion amplifiers are used to provide longer travel ranges of 100µm and above. The U-780 2-axis microscope stage is based on ultrasonic linear motors and provides travel ranges up to 100mm and above. It uses mechanical bearings instead of flexures.
P-612 XY Piezo-Nanopositioner
Compact, Aperture, Low Cost
- 100x100µm motion
- Small footprint: 60x60mm
- <1 nanometer resolution
- For cost-sensitive applications
- 20x20mm aperture
P-763 XY-Piezo Nanopositioner
Compact, Aperture, Low Cost
- 200x200µm motion
- Small footprint: 70x70mm
- <2 nanometer resolution
- 30x30mm aperture
- Capacitive direct metrology
P-733.2DD High-Dynamics Scanners
Fastest XY Piezo Stages
- 30µm motion
- Direct drive = Higher dynamics
- Up to 2.2 kHz resonant frequency
- 100 picometers resolution
- Frictionless precision flexure guides
P-545 Particle Tracking Stage
High Dynamics in XY/Z
- 70x70x50µm motion
- Direct drive = Higher dynamics
- Easy integration in microscopes
- Sub-nanometer resolution
P-733 XY Piezo Scanning Stages
Parallel Metrology, 100µm
- 100x100µm motion
- <0.3 nanometer resolution
- Capacitive feedback
- 50x50mm aperture
- Frictionless precision flexure guides
P-542 XY Piezo Stages
Low-Profile, Large Aperture
- 200x200µm motion
- Low profile: 16.5mm
- 80x80mm aperture
- <1nm resolution, closed-loop
- High-speed direct drive option
P-517, P-527 XY Piezo Stages
Large Aperture, 100 & 200µm
- 100 & 200µm motion range
- Sub-nanometer resolution
- Capacitive feedback
- 66x66mm aperture
- PICMA® long-life piezo drives
P-561 / 2 / 3 PImars, XYZ Piezo Stage
High End Performance, to 300µm
- 100-300µm XY & XYZ motion
- Six-axis option
- Sub-nanometer resolution
- Ultra-fast XY and XYZ versions
- PICMA® long-life piezo drives
P-734 XY Nanopositioning Stage
Ultra-Precision Trajectory Control
- 100x100µm motion
- Low bow: nanometer flatness
- Sub-nanometer resolution
- Direct-metrology = Higher precision
- Ideal for surface analysis
P-545 PINano® XY/XYZ Microscope Stage
Package with Digital Controller
- 200µm motion
- Nanometer resolution
- Easy integration in microscopes
- Sensor choice: Piezoresistive (PRS) - lower cost; Capacitive - higher linearity
U-760 / U-781 XY Inverted Microscope Stage
Silent Ultrasonic Linear Motor
- 25x25mm & 128x86mm XY motion range
- 10nm encoder resolution
- Up to 120mm/sec velocity
- Combines with piezo flexure scanners
- Self clamping = Ultra-high stability
- With joystick and controller
With the use of flexures mechanisms, the motion of a piezo stack can be multiplied many times to achieve up to one millimeter travel (or more in extreme cases). Flexures can be designed to also double as guiding and preloading mechanisms. Flexure motion is based on the elastic deformation (flexing) of a solid material. Friction and stiction are entirely eliminated, and flexures exhibit high stiffness, load capacity, and resistance to shock and vibration. Flexures are maintenance free and not subject to wear. They are vacuum compatible, operate over a wide temperature range, and require neither lubricants nor compressed air for operation.
