US-Made Linear Stages, Rotary Stages, Mechanical & Air Bearings

Direct-Drive, Direct Encoders, for High Precision and High-Throughput Applications

The following high-precision linear stages, rotary stages and gantries are designed and manufactured by PI’s U.S. operation in Shrewsbury, MA, for demanding automation, photonics, semiconductor, and life-science applications. Built around direct-drive motors, high-precision bearings and direct-measuring encoders, these stages deliver high speed, exceptional accuracy, and long-term reliability. U.S. manufacturing ensures consistent quality, fast delivery, and responsive engineering support for high-throughput, high-precision motion control systems.

Learn more about PI USA’s air bearing stages and piezo-motor-driven nanopositioning stages.

V-131 Miniature Voice-Coil Stage

40mm Width, Optional Counterbalance

8mm travel
5nm resolution
2µm accuracy
2g acceleration
4.5N push/pull force

V-141 Low-Cost Linear Motor Stage

Compact, High Force, 80mm Width

40, 60, and 100mm travel
120nm bidirectional repeatability
2µm accuracy
1m/sec max. velocity
Up to 45N push/pull force

V-571 Compact Linear Motor Stage

95mm Stage Width

25/50/75/100mm travel
1µm straightness/100mm
120nm bidirectional repeatability
1nm absolute encoder resolution
0.5m/sec max. velocity
21N push/pull force

130mm Stage Width

60/110/150/210mm travel
0.8 - 1.5µm straightness
160nm bidirectional repeatability
1nm absolute encoder resolution
0.5m/sec max. velocity
60N push/pull force

V-573 Linear Motor Stage

160mm Stage Width

1 - 1.75µm straightness
160/260/360mm travel
80nm bidirectional repeatability
1nm absolute encoder resolution
500mm/sec max. velocity
140N push/pull force

160mm Stage Width

1 - 1.5µm straightness
60/130/230mm travel
80nm bidirectional repeatability
1nm absolute encoder resolution
1m/sec max. velocity
58N push/pull force

Details Longer Travel

V-827 Linear Motor Stage

Wide Base, High Load, to 1m Travel

300/500/750/1000mm travel
150nm bidirectional repeatability
1nm absolute encoder res.
2m/sec max. velocity
720N push/pull force

4”/8”/12”, Linear Motor & Encoder

4”/8”/12” XY travel (110 - 310mm)
0.01µm min. inc. motion
0.001µm sensor resolution
1m/sec max. velocity
50kg load
Linear motor, linear encoder

Compact, Affordable, Al Base

50x50mm to 300x400mm travel
15kg load
1nm resolution
Light weight, AL base
Dynamic error mapping
2m/sec / 2.7g max. acceleration

The PIglide HS planar air-bearing stage has been designed to maximize throughput while providing the ultimate level of precision. This stage is ideal for wafer inspection and scribing applications, as well as other ultra-precision motion applications such as flat panel inspection. The cross-beam mounts to the Y axis via a highly engineered flexural coupling that provides yaw-compliance without sacrificing system stiffness. The gantry axis is a dual air-bearing design that incorporates dual linear motors and dual linear encoders. Ironless linear motors provide smooth motion and no cogging or attractive forces. Both incremental and absolute encoder options are available. The PIglide HS incorporates three high-accuracy linear encoders, one for the bridge axis and two for the gantry axis. The PIglide HS is coupled with industry-leading digital controls that offer superior servo update rates (up to 5 kHz), advanced control algorithms to improve dynamic performance and error compensation, and a wide suite of software development tools.

3&4-Motor Designs, Granite Base

3 Models: Base, Plus, Ultra
500x1000mm max. travel
15kg load
1nm resolution
Active yaw control flex coupling
Dynamic error mapping
1m/sec / 2g max. acceleration

Details Article Video PDF - All New Models

V-131 Miniature Voice-Coil Stage

40mm Width, Optional Counterbalance

8mm travel
5nm resolution
2µm accuracy
2g acceleration
4.5N push/pull force

V-141.Z Vertical Stage

Magnetic Counterbalance, 80mm Width

40 & 60mm motion
3-Phase linear motor
Adjustable Z-counterbalance
1.2kg max. vertical load
Linear encoder

details x Read Article

V-571.Z Vertical Stage

Magnetic Counterbalance, 95mm Width

25 & 50mm motion
3-Phase linear motor
Adjustable Z-counterbalance
4kg max. vertical load
Absolute linear encoder

Details x Read Article

V-572.Z Vertical Stage

Magnetic Counterbalance, 130mm Width

50mm motion
3-Phase linear motor
Adjustable Z-counterbalance
7kg max. vertical load
Absolute linear encoder

DETAILS x Read Article

A-123-Z-Vertical-Translation-Stage-Air-Bearing

Pneumatic Counterbalance

50, 100, 150mm motion
3-Phase linear motor
Adjustable Z-counterbalance
10kg max. vertical load
Linear encoder

Details . Read Article

V-62x Ultra-High Precision Rotation Stages

Direct Drive, Absolute Encoder Option

85/110/210mm turn table
0.0015µrad max resolution
7200°/sec max. velocity
15kg load
Torque motor
Sine/cosine or absolute encoder

Details t3://file?uid=83911

The PIglide RM series of motorized rotary air bearing stages are a complete positioning solution designed for accuracy, precision, high stiffness, and ease of use. They can be used in any orientation. These stages feature high performance, low-cogging frameless slotless torque motors, and optical encoders. Various options can be combined to create a solution ideal for point-to-point indexing or constant velocity scanning. Applications include optical alignment, metrology, inspection, calibration, and scanning. The RM stages offer superior runout, flatness, and wobble performance. Since they are completely frictionless, they exhibit no breakaway “stiction” or drag friction during operation. They are ideal for use in cleanrooms, require no maintenance or lubrication, and have unlimited life.

Direct Drive, High Load

2/4/6/8/12” table diameter
13 to 420kg load
0.008µrad max. resolution
40 to 100nm flatness
500 to 2500 RPM max.

Details Article

A-635/37 PIglide Rotary Stages

Low Profile, Large Diameter

6/8/14” table diameter
20/32/60/120kg load capacity
0.03µrad max. resolution
<100nm eccentricity & flatness
500 RPM max.
Self-locking option at rest

Air Bearings & Linear Bearings, Linear Motors

Air Bearings & Linear Bearings, Linear Motors

300x300 to 500x1000mm XY travel
10kg load
Absolute encoders, 1nm resolution
Z-Stage options: linear motors or ball screws
Dynamic error mapping
2m/sec max velocity (cross axis)

Details Drawing

A-351 Overhead Gantry XY / XYZ Stage

Linear Bearings, Linear Motors

300x300 to 500x1000mm XY travel
20kg load
Absolute encoders, 1nm resolution
Z-Stage options: linear motors or ball screws
Dynamic error mapping
2m/sec max velocity (cross axis)

DETAILS Drawing

A-352 Large XY / XYZ Gantry Stage with Linear Bearings, Linear Motors

Linear Bearings, Linear Motors

750x750 to 1000x2000mm XY travel
30kg load
Absolute encoders, 1nm resolution
Z-Stage options: linear motors or ball screws
Dynamic error mapping
2m/sec max velocity (cross axis)

Details PDF Drawing

This series of motion controllers from PI offers a completely integrated electronics solution, with controller, drives, and power supplies packaged together. The A-81x is in a compact 19-inch rack-mount enclosure for 1, 2, or 4 axes of motion, while the slightly larger A-82x is capable of controlling 4, 6, or 8 axes. These controllers are designed and optimized to work with the PIglide line of air bearing stages which feature direct drive linear and rotary servo motors and high resolution encoders.

High Power: 4, 6 & 8 Motion Axes

Fully integrated closed-loop servo, amplifier module & power supplies
2000 W continuous, 3900 W peak
3-Phase BLDC / voice coil / DC
Quiet PWM drives
Sine/cosine and BiSS-C encoders
20A peak output current/axis

This series of motion controllers from PI offers a completely integrated electronics solution, with controller, drives, and power supplies packaged together. The A-81x is in a compact 19-inch rack-mount enclosure for 1, 2, or 4 axes of motion, while the slightly larger A-82x is capable of controlling 4, 6, or 8 axes. These controllers are designed and optimized to work with the PIglide line of air bearing stages which feature direct drive linear and rotary servo motors and high resolution encoders.

Compact: 1, 2 & 4 Motion Axes

Fully integrated closed-loop servo, amplifier module & power supplies
600W power supply
3-phase BLDC / voice coil / DC
Quiet PWM drives
Sine/cosine and BiSS-C encoders
10A Peak output current/axis

A-811 PIglide Motion Controller 1-Axis Benchtop Version

1-Axis Benchtop Version

Fully-integrated servo-controller with drive
Compact benchtop device, external AC/DC-P/S
For 3-phase / voice coil / DC motors
Quiet PWM drives
Sine/cosine and BiSS-C encoders
Functional safety: STO (Safe Torque Off)