Hexapods, 6-axis positioning stages, are based on parallel kinematics, and often referred to as Stewart Platforms. A hexapod positioning system is based on a 6-axis actuator system (XYZ, Pitch, Roll, Yaw) arranged in parallel between a top and bottom platform. PI's parallel kinematics (PKM) multi-axis precision positioning systems have many advantages over conventional serial kinematics stages, including lower inertia, improved dynamics, smaller package size, and higher stiffness. The user-programmable pivot point – integral to all PI high-performance hexapod multi-axis motion controllers – provides additional benefits, especially in alignment applications of lenses, optics, and fiber optic components. Watch a short pivot-point demo video
With four decades of six-axis Hexapod stage design and manufacturing experience, PI electro-mechanical hexapods and piezo hexapod positioners are the most advanced multi-axis precision positioning systems in the world. They provide significantly higher precision than hydraulically driven systems and are available in many sizes, and configurations for loads from 2kg to more than 1000kg, and most models are self-locking when powered down.
In addition to classical "Stewart Platform" type hexapods, PI also offers alternative parallel positioners, such as the SpaceFAB 6DOF Motion Platform design, which allows for longer linear travel ranges with a lower profile.
Controller and Software, Hexapod Simulation Tool
PI hexapods are operated by dedicated, state-of-the-art vector motion controllers with virtual pivot point capability. An extensive software package including alignment algorithms for fiber optics or lenses, as well a simulation tool are included.
Standard and Vacuum Versions
Many of our 6DOF hexapods and parallel positioners are available in vacuum versions, some for UHV levels to 10-9 Torr.
High-Speed / Dynamics Hexapod Platforms for Motion & Vibration Simulation
PI provides several solutions, with brushless motors and voice-coil linear motor direct drives. Watch video of highly dynamic, linear-motor hexapod platform
Miniature High Precision Hexapod 6-Axis Stages with Electromagnetic Motors and Precision Screw Drives
The H-811 miniature high precision hexapod strikes a perfect balance of size, load and performance. It has many applications in micro-assembly, silicon photonics alignment and also comes in a high-dynamics version for image stabilization. A vacuum-compatible version to 10-6 hPa is also available. The H-810 is similar, with a smaller base plate diameter.
Special Systems for Photonics Alignment
For fiber alignment and photonics alignment, a special F-712.HU1system based on the H-811 is also available.
H-811 Miniature Hexapod
Brushless DC Motors
- 34x32x13mm XYZ travel
- 20x20x41° rotary travel
- 5kg load
- 5nm actuator resolution
- 10mm/sec max. velocity
- Ø136mm base, 114mm height
H-810 Miniature Hexapod
Smallest Hexapod w/ BLDC Motors
- 40x40x13mm XYZ travel
- 20x20x60° rotary travel
- 3kg load
- 5nm actuator resolution
- 6mm/sec max. velocity
- Ø100mm base, 118mm height
H-811.S High Dynamics Hexapod
Motion Simulation / Stabilization
- CIPA certified for camera testing
- Dynamics to 25Hz / 0.1°
- 25mm/sec
- 80nm actuator resolution
- Controller with wave generator
- Ø136mm base, 114mm height
Most of these high performance 6-DOF hexapod stages are available with brushless motors for long life operation. Some provide absolute measuring encoders – no referencing required after power up. The H-824 and H-825 models use a folded drive train for reduced height.
H-824 Compact Hexapod
Low Cost, Low Profile
- 45x45x25mm XYZ travel
- 15x15x25° rotary travel
- 10kg & 5kg load
- 7nm & 500nm actuator resolution
- 1mm/sec & 25mm/sec max. velocity
- Ø281mm base, 190mm height
H-825 Compact Hexapod
BLDC Motors, Absolute Encoders
- 55x50x28mm XYZ travel
- 23x28x38° rotary travel
- 30kg & 5kg load
- 8nm & 250nm actuator resolution
- 2mm/sec & 20mm/sec max. velocity
- Ø281mm base, 195mm height
H-840 Hexapod w/Absolute Encoders
High Dynamics, Brushless Motors
- 100x100x50mm XYZ travel
- 30x30x60° rotary travel
- 30kg & 10kg load
- 8nm & 250nm actuator resolution
- 2mm/sec & 60mm/sec max. velocity
- Ø348mm base, 328mm height
H-840 High Precision Hexapod
Brushless Motors
100x100x50mm XYZ travel
30x30x60° rotary travel
40kg load
20 nm steps, 0.1µm repeatability
2.5mm/sec max. velocity
Ø348mm base, 320mm height
H-820 Low-Cost Hexapod
BLDC Motors
- 100x100x50mm XYZ travel
- 30x30x60° rotary travel
- 20kg load
- 200nm actuator resolution
- 20mm/sec max. velocity
- Ø350mm base, 308mm height
These high performance, high load hexapods are designed for standard loads up to 1000kg (higher load custom versions can also be offered). Despite the high load capacity, they deliver sub-micron resolution. PI’s special cardanic joints with Z-offset provide the highest stiffness and best orientation-independent performance and are ideal for industrial automation and production.
H-850 250kg Hexapod
Gear & Direct Drive, BLDC
- 100x100x50mm XYZ travel
- 30x30x60° rotary travel
- 250kg & 50kg load
- 2nm & 50nm actuator resolution
- .5mm/sec & 8mm/sec max. velocity
- Ø348mm base, 328mm height
H-855 500kg Hexapod Family
Self Locking to 5000N
200x200x100mm linear travel
50x50x80° rotary travel
500kg load
4.5mm & 2deg/sec max. velocity
Ø560mm base, 480mm height
Highest Dynamics
The high-speed H-860 6-axis stage is designed for highest acceleration. Its frictionless design is based on closed-loop voice coil drives, flexure guides and carbon fiber struts for minimized mass and inertia – ideal for image stabilization / simulation applications.
Smallest Size
The H-811 is a CIPA certified miniature hexapod with brushless motors and ball screw struts.
Highest Load
The H-900KSCO is designed for high loads in precision industrial automation, machine tools, automotive manufacturing, and simulation of motion on vessels.
H-860 Fast “Shaker Hexapod”
Voice Coils, Flexures, Carbon Fiber
- 15mm XYZ travel
- 8° rotary travel
- 1kg load
- 5nm actuator resolution
- 250mm/sec / 4g acceleration
- Frictionless flexure guides
H-811.S High Dynamics Hexapod
Motion Simulation / Stabilization
- CIPA certified for camera testing
- Dynamics to 25Hz / 0.1°
- 25mm/sec
- 80nm actuator resolution
- Controller with wave generator
- Ø136mm base, 114mm height
H-900KSCO Dynamics Hexapod
60kg, 80mm/sec BLDC
- 200x200x170mm XYZ travel
- 66x66x66° rotary travel
- 60kg load
- 580nm actuator resolution
- 80mm/sec max. velocity
- Motion simulation: ISO20672, ISO8728, ISO 16328
H-811 Mini Vacuum Hexapod
Brushless DC Motors
- 34x32x13mm XYZ travel
- 20x20x41° rotary travel
- 5kg load
- 60nm repeatability
- 20mm/sec max. velocity
- Ø136mm base, 114mm height
H-824.V Vacuum Hexapod
Load Capacity to 5kg, Low Profile
- 45x45x25mm XYZ travel
- 15x15x25° rotary travel
- 2.5kg and 5kg load capacity
- To 0.3µm incremental motion
- To 5mm/sec max. velocity
- Ø281mm base, 190mm height
H-850.V Vacuum Hexapod
Load Capacity to 80kg
- 100x100x50mm XYZ travel
- 30x30x60° rotary travel
- 25kg and 80kg load capacity
- To 0.2µm incremental motion
- To 2.5mm/sec max. velocity
- Ø348mm base, 328mm height
6-Axis UHV Hexapod
Technology Demonstrator
- 3x3x3mm XYZ travel
- 2x2x2° rotary travel
- UHV-compatible to 10-9 hPa
- Ø100mm base, 90mm height
- Piezo motor, non magnetic
M-850KWAH Astronomy Hexapod
Weather-Resistant, Ø420mm Apt.
- 20x22x32mm XYZ travel
- 75kg load, any orientation
- Rubber boots
- IP64 level protection
- Ø580mm base, 357mm height
M-850KHTH High Load Hexapod
1000kg, Ø500mm Aperture
- 400x400x200mm XYZ travel
- 40x40x10° rotary travel
- 1000kg load, any orientation
- 0.8µm / 0.5µrad resolution
- 1mm/sec max. velocity
- Ø900mm base, 714mm height
M-850.K102 High Load Hexapod
Vacuum Compatible, 1000kg
- 24x24x24mm XYZ travel
- 6x6x8° rotary travel
- 1000kg load
- 2µm repeatability
- .5mm/sec max. velocity
- Ø1000mm base, 500mm height
H-850KMLx 500kg Hexapod
Self Locking to 4000N
- 100x10x50mm XYZ travel
- 30x30x60° rotary travel
- 500kg load
- Absolute encoder option
- .5mm/sec max. velocity
- Ø410mm base, 362mm height
M-850KLAH Large Aperture Hexapod
640x820mm Aperture
- 50x50x50mm XYZ travel
- 10x10x10° rotary travel
- 200kg load
- 2mm/sec max. velocity
- 1000x840x400mm
These piezo-stack driven systems provide faster response than conventional stages, in the low millisecond range, however with positioning ranges limited to <1mm.
P-587 and P-562 are flexure guided, piezo driven stages with capacitive feedback for application, such as ultra-resolution microscopy and optical lithography, etc.
P-587 Nano-Positioning Stage
6-Axis, Parallel Metrology
- 800x800x200µm XYZ travel
- 1x1x1mrad rotary Travel
- Flexure guided
- 0.7nm sensor resolution
- Up to 235Hz resonant frequency
- 240x240x50mm
P-562 Nano-Positioning Stage
6-Axis, Parallel Metrology
- 200x200x200µm XYZ travel
- 1x1x1mrad rotary travel
- Flexure guided
- 1nm sensor resolution
- Up to 190Hz resonant frequency
- 150x150x30mm, 66mm Aperture
P-915KWEF Piezo Hexapod
Direct Drive, Stiff, Ultra-Fast
- 70µm XYZ travel
- 0.08x0.08x0.08° rotary travel
- 0.2nm repeatability
- Up to 1.7kHz resonant frequency
- Ø135mm base, 50mm height
C-887.5 for Motorized Hexapods
Ethercat Option
- Coordinate transformation built-in
- Vector algorithms
- Extensive software support
- Programmable pivot point
- User-defined coordinate system
- 2 add‘l motor outputs
- Optional analog input
E-712 6-Axis Piezo Controller Family
For N-865, P-587, P-915KWEF
- Coordinate transformation built-in
- Modular design
- For capacitive sensors and incremental sensors
- For direct drives and PiezoWalk motors
C-887.MC Manual Control Unit
For C-887 Hexapod Controllers
- 1 knob per Cartesian axis
- LCD display for all Cartesian axes
- Programmable step size
