Sub-Nanometer Resolution Sensors: Nano-Measuring / Nano-Metrology

Non-Contacting Sensors for Nanometer Precision Measurement and Positioning

Capacitance (capacitive) displacement sensors are absolute-measuring, high-dynamics nano-metrology devices providing the highest linearity and accuracy. PI capacitance sensors / signal conditioner electronics make use of a high-frequency AC excitation signal for enhanced bandwidth and drift-free measurement stability (sub-nanometer stability over several hours is possible). PI has been a world market leader in nanopositioning technology for decades. In order to provide nanopositioning systems of the highest accuracy class with better than one nanometer resolution, PI started to develop capacitive position sensing devices 30 years ago. Since then, thousands of single and dual probe sensors and controllers have been manufactured for use in PI's closed-loop piezo positioning stages and in a variety of custom nanometer precision measuring applications.

PI advantages:

Single & dual-plate sensors available for greater flexibility
Measuring bandwidth to 10kHz
Sub-nanometer resolution
Custom multi-sensor electronics (analog & digital) available
Closed loop motion controllers available
Custom nanometer precision positioning systems with integrated capacitive sensors available

Capacitive Distance Measuring Principle

Two types of capacitive distance sensors are common: Single electrode sensors and two electrode sensors.

Dual electrode sensors can achieve lower noise levels and higher resolution. The principle is based on two conductive surfaces and a high-frequency (>100kHz) alternating current generating a homogenous electric field between them. The capacitance is proportional to the active surface divided by the distance. With a given area, the measured distance is proportional to the distance. Single-electrode capacitive sensors work similarly. They are easier to handle and can measure against all kinds of conductive surfaces.

More information on capacitive measuring technology

PI Capacitive Position Sensors, Metrology Solutions Brochure

D-015, D-050, D-100 Sub-Nanometer-Resolution Dual-Plate Capacitive Position Sensors

Measuring range to 1000 micron
<0.01 nanometer resolution
Linearity to 0.003 %
Bandwidth to 10 kHz
Integrated Linearization System (ILS)
Custom designs

Details

PISeca™ capacitive displacement sensors perform non-contact measurements of geometric quantities representing separation, position, length or other linear dimension against electrically conductive references such as metallic planes. These single-probe sensors combine superior resolution and linearity with very high bandwidth for dynamic measurements. Standard come with measuring ranges from 20 to 1000 µm. Capacitive position gauges such as PISeca™ are fundamentally very temperature stable and easy to work with.

Provides <1 Nanometer Resolution

<1 nanometer resolution, measuring ranges to 500µm
Absolute, non-contact measurement of distance / motion / vibration
Multi-axis measurements possible
Excellent measuring linearity to 0.1%
Plug & play: easy setup and integration
Very temperature stable
Bandwidth to 10kHz
Guard-ring electrode design for better sensor linearity
ILS linearization system in the signal conditioner electronics improves output signal linearity
All systems factory calibrated for highest possible linearity / accuracy

Details