PISeca capacitive single-electrode sensor, 8 mm diameter, 20 µm nominal measuring range
D-510 PISeca Capacitive Sensors
Single-Electrode Sensors with Excellent Position Resolution
- Noncontact distance measuring
- Absolute position sensing
- Vibration measuring
- Subnanometer resolution
- Flexible measuring range
- Easy integration
Highest accuracy and long lifetime due to capacitive position sensors
In conjunction with the electronics for signal processing, a resolution can be reached in the subnanometer range for quasistatic applications. The bandwidth can be increased up to 10 kHz for high dynamics applications, where a resolution in the 1 nm range can still be reached. The linearity error is under 0.1 %.
Easy handling and integration
All PISeca sensor heads are equipped with a LEMO connector for easy mounting and replacement. The uniform shaft thickness ensures compatibility and flexibility. The cable for connecting to the evaluation electronics is available in several variants and must therefore be ordered separately.
Customized versions / two-electrode sensors
In addition to the standard sensors listed here, PI offers a series of application-specific custom versions where for example, the measuring range, geometry, or material are adapted to customer requirements. Customized electronics are also available.
The two-electrode sensors in the D-100 series are available for the highest demands on linearity and resolution.
Application fields
Industry and research. Semiconductor manufacturing and inspection. Nanometrology. Active vibration absorbers. Precision machining.
Specifications
Specifications
Sensor | D-510.021 | D-510.051 | D-510.101 |
---|---|---|---|
Temperature stability | — | 53 nm/K | — |
Sensor type | Single electrode, capacitive | Single electrode, capacitive | Single electrode, capacitive |
Nominal measuring range | 20 µm | 50 µm | 100 µm |
Linearity error in the nominal measuring range | 0.2 % | 0.1 % | 0.1 % |
Smallest measuring gap in the nominal measuring range | 10 µm | 25 µm | 50 µm |
Largest measuring gap in the 5-times extended measuring range | 150 µm | 375 µm | 750 µm |
Static resolution in the nominal measuring range, RMS | < 0.001 % | < 0.001 % | < 0.001 % |
Dynamic resolution in the nominal measuring range, RMS | 0.002 % | 0.002 % | 0.002 % |
Sensor active area | 11.2 mm² | 27.9 mm² | 56.1 mm² |
Miscellaneous | D-510.021 | D-510.051 | D-510.101 |
Operating temperature range | -20 to 100 °C | -20 to 100 °C | -20 to 100 °C |
Overall mass | 8 g | 10 g | 16 g |
Suitable connecting cable | D-891.01E, D-891.02E, D-891.01A, D-891.02A | D-891.01E, D-891.02E, D-891.01A, D-891.02A | D-891.01E, D-891.02E, D-891.01A, D-891.02A |
Material | Stainless steel | Stainless steel | Stainless steel |
Recommended evaluation electronics | E-852.10, E-852.10A1, E-711.SE3 | E-852.10, E-852.10A1, E-711.SE3 | E-852.10, E-852.10A1, E-711.SE3 |
Nominal measuring range and measuring gaps: Extended measuring range available with E-852.10, two measuring ranges are calibrated respectively. Extension factors: 1, 2, 2.5, 5.
Static resolution: Bandwidth 10 Hz with E-852 evaluation electronics.
Dynamic resolution: Bandwidth 10 kHz with E-852 evaluation electronics.
Tolerances:
Linearity error in the nominal measuring range: max.
Dynamic resolution in the nominal measuring range, RMS: max.
Overall mass: ±5 %
Downloads
Datasheet
Documentation
User Manual D510T0001
D-510 PISeca Single-Electrode Capacitive Sensor Probe
3D Models
D-510 STEP
Ask for a free quote on quantities required, prices, and lead times or describe your desired modification.
PISeca capacitive single-electrode sensor, 12 mm diameter, 50 µm nominal measuring range
PISeca capacitive single-electrode sensor, 20 mm diameter, 100 µm nominal measuring range