P-290.00 Amplified Piezo Actuator - Flexure Stage (Macroscale Piezoelectric Actuator)

  • Amplified Piezo Actuator
  • Displacement to 1000 µm
  • Integrated Double Flexure Motion Amplifier
  • Non-Magnetic Stainless Steel Design

P-290 is an amplified piezo actuator with a vertical stroke 1000 µm. It is designed for high resolution static and low dynamic positioning applications.

The latest generation of amplified piezo actuators is shown below:

 

Application Examples

Wafer inspection, nanopositioning, medical analysis, biology, optics

Working Principle

P-290 is a vertical Z-stage positioning platform driven by a piezoelectric drive system. The drive system consists of two stacked Piezo flexure tilt nanopositioning stages (similar to P-287) machined of one solid piece of stainless steel. Each of the two tilt stages is equipped with a high voltage piezoelectric stack (is there a link for this?) actuator (0 to -1000 V) integrated into a zero stiction/friction wire EDM (Electric Discharge Machining) cut flexure motion amplifier system. The positioning platform is guided by linear ball bearings to eliminate tilt.

More Vertical Translation stages (Z-stages) are shown below:

Options:
P-705.00 positive polarity.

Ordering Information:
P-290.00 Vertical Amplified Piezo Flexure Stage, 1000 µm

 

TECHNICAL DATA:

Models

P-290.00

Units

Notes

Active axes

Z

  

Open loop travel @ 0 to -1000 V

1000

µm ± 20 %

A4

** Open loop resolution £

100

nm

C0

Stiffness

0.07

N/µm ± 20 %

D1

Push/pull force capacity
(in operating direction)

(50/10)

N

D3

Max. (+/-) normal load

5

kg

D4

Electrical capacitance

500

nF ± 20 %

F1

* Dynamic operating current coefficient
(DOCC)

0.63

µA/(Hz x µm)

F2

Unloaded resonant frequency

100

Hz ± 20 %

G2

Voltage connection

VH

 

J1

Operating temperature range

-20 to 80

° C

H2

Weight (with cables)

280

g ± 5 %

 

Body material

N-S, S

 

L

Recommended Amplifier/Controller

B, I

 

M

 

* Dynamic Operating Current Coefficient in µA per Hertz and µm.
Example: Sinusoidal scan of 300 µm at 5 Hz requires approximately 1 mA drive current.

** Noise equivalent motion with E-507 amplifier.


 

Related Products and Additional Resources

This is a legacy product that may have limited availability or may have been replaced. Ask a PI engineer for an equivalent new model.

Back to Overview