3D Profiling of Small Components & Features

Gantry Solutions for Fast and Reliable Sensor Placement and Scanning

Fast and reliable measurement of the surface profile of smallest components and features places high demands on the motion and control systems as well as on the sensor technology: End products must meet the requirements regarding functionality and quality. The sensor technology used should be chosen based on criteria such as sensor resolution, measuring range, and speed of data acquisition. In case of a laser-based sensor, the size of the focal spot, measurement field, or view area and the ability to focus must also be considered. The motion control system has to be configured in a way that the sensor can be placed quickly and accurately at the point or in the areas of interest. This requires either fast movement to the position with a short settling time or fast, uniform scanning of a specific area.

Compact and economic design

Highly repeatable motion path

Extremely small measurement spot size

High sensor bandwidth and resolution for fast responsiveness

Increased throughput thanks to step-and-scan algorithm

Physik Instrumente – 3D Profiling of Small Components and Features

Ironless linear motors for high-dynamic, precise and smooth motion for fast step-and-scan
Absolute encoders avoid referencing and ensure operational safety
XY drag chain cable management maintains cable integrity and prolongs lifetime
>> V-855 High-Speed Linear Stage

High-precision ball screw linear stage with stepper motor and holding brake for reliable operation with simple and extremely stable positioning
Folded drivetrain and compact design reduces installation space
Low-weight design to maintain gantry dynamics
>> L-836 Stackable, Highly Compact, Universal Linear Stage

Voice coil direct drive motor for friction-free operation, high scan frequencies and fast step-and-settle
High-resolution linear encoders for accurate position feedback
Adjustable weight force compensation for safe operation
Easy integration thanks to flexible mounting options
>> V-308 Voice Coil PIFOC Focus Drive for Objectives

Spot size down to 2 µm for the measurement of tiny features, as well as for extremely precise positioning
Wide range of working distances
High resolution at fast speeds for dynamic autofocus compensation and high throughput

EtherCAT® motion control and drive modules provide open network connectivity
Conversion of sensor output to position data for fast output via analogue or digital interfaces
Extensive motion controller algorithms for fast move-and-settle, as well as smooth scanning
Autofocus capabilities for dynamic focus adjustment
>> Motion Controller

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