P-915KLVS Large Aperture, Vacuum Compatible XYZ Nanopositioning Stage and Piezo Scanner
With a large clear aperture of 200x200mm, the P-915KLVS piezo nanopositioning stage provides 3-axis motion in XYZ with high-dynamics (fast start stop, and settling, scanning performance). The piezo stage is vacuum compatible.
- Vacuum Compatible to 10-6 hPa
- Direct Metrology with Nano-measuring Capacitive Sensors, Sub-Nanometer Resolution
- Excellent Straightness: <0.1 µrad Runout
- Frictionless, Zero-Wear, High-Precision Flexure Guiding System
P-915KVPZ Large Aperture, Vacuum-Compatible Piezo-Z Stage
The P-915KVPZ piezo nanopositioning stage, for vertical Z-Axis motion, offers high-load capacity and high dynamics with its direct-drive, high-stiffness piezo drive design. The large clear aperture is an advantage in lithography and transmitted light applications.
- Travel Range 45 µm
- Large Clear Aperture 273 x 273 mm
- Nanometer resolution with Capacitive Sensors
- Direct Drive Piezo Actuators for High Dynamics and Stiffness
- Vacuum Compatible up to 10-6 hPa
- Outstanding Lifetime Due to PICMA® Piezo Actuators
Datasheets & Additional Information
- Motion Ranges to 100x100 µm in X,Y & to 10µm in Z (vertical)
- 0.1 nanometer resolution with Capacitive Sensors, Ideal for Super-Resolution Microscopy
- High-Speed Versions with Direct Drive Piezo Actuators
- Parallel Kinematics for Better Multi-Axis Accuracy and Dynamics
- Parallel Metrology for Active Trajectory Control
- Frictionless, High-Precision Flexure Guiding System
- Clear Aperture 50 x 50 mm for Transmitted-Light Applications
- Ultra-High-Performance Closed-Loop Piezo Scanner for AFM/SPM
- Compact Manipulation Tool for Bio/Nanotechnology
- Resonant Frequency 9.8 kHz
- Capacitive Sensors with Sub-nanometer Resolution for Highest Accuracy
- Parallel-Motion Metrology for Automated Compensation of Guiding Errors
- Piezo drives with 50 Picometers Resolution
- 5 x 5 x 5 µm Motion Range
Datasheets & Additional Information
