PIHera XY Piezo Stages: Compact Nanopositioning Systems for Ultra-Precise Motion and Long-Term Stability

PIHera XY stages with variable travel ranges for nanometer-precise positioning and alignment

The piezoceramic actuator is the heart and drive of the PIHera XY stages. PI relies on PICMA® multilayer actuators manufactured in-house. These actuators are characterized by high reliability and a long lifetime, as their all-ceramic insulation protects them against humidity.

Ultraprecise Positioning Accuracy

Positioning in the subnanometer range with high repeatability and optimum stability is based on high-quality capacitive sensors. High guidance accuracy is achieved with backlash-free flexure guides.

Flexible in Use and Quickly Available

The XY piezo stages P-621.2CD, P-622.2CD, P-625.2CD, and P-628.2CD provide travel ranges of 120 µm to 1000 µm and thus enable a wide range of applications. In the semiconductor and photonics industries, for example, they are used for interferometry to align laser systems or optical components, or for wafer inspection. The XY stages are also widely used in microscopy to position and stabilize samples and objects with nanometer precision.

Short lead times allow for the efficient execution of time-critical projects.

For more information, refer to:

PIHera: Piezo Stages with Short Lead Times

About PI

PI is a global leader in high-precision motion control, nanopositioning, and piezo technology. Our solutions empower innovation across key markets including photonics, semiconductors, aerospace, precision automation, microscopy, and life sciences.