- Nanopositioning Stage with Closed-Loop Piezo Actuators
- Parallel-Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision
- Motion Ranges to 340 x 340 x 340 µm
- Capacitive Nanopositioning Sensors for Highest Linearity
- Frictionless, High-Precision Flexure Guiding System
- Excellent Scanning Flatness
- High-Dynamics XYZ Version Available; Custom Versions to 6-DOF
- Clear Aperture 66 x 66 mm
- Outstanding Lifetime Due to PICMA® Piezo Actuators
- UHV Versions to 10-9 hPa
