P-287 Tilt Nanopositioning Stage - Piezo Flexure Stage, Nano-Positioner

  • Tilt to 0.7 degrees
  • Vertical Travel to 700 µm
  • Non-Magnetic Stainless Steel Design

P-287 is a high resolution, piezoelectrically driven tilt stage for nanopositioning applications. This amplified piezo actuator flexure guided tilting stage provides tilt angles up to 12 mrad and vertical travel up to 700 µm at the tip. A ball seat is machined into the tip to decouple the rotation if the P-287 is used as a linear drive. In this case an external guiding system is recommended (e.g. frictionless diaphragm spring).

Application Examples

Wafer inspection, nanopositioning, medical analysis, biology, optics

The latest generation of amplified piezo actuators is shown below.

Working Principle


P-287 tilt stage nanopositioners are equipped with high voltage piezoelectric drives (0 to -1000 V) integrated into a zero stiction/friction, ultra-high resolution wire EDM (Electric Discharge Machining) cut flexure motion amplifier system. The linear motion of the piezo translator produces an arc motion at the tip.

Low voltage versions of P-287 are available on request.

Options:
P-703.20 High Vacuum Modification

P-705.00 Positive Polarity

Ordering Information:

P-287.70 Vertical / Tilt Piezo Flexure Stage, 12 mrad, 700 µm

 

TECHNICAL DATA:

Models

P-287.70

Units

Notes

Active axes

θ X, (Z)

  

Open loop travel @ 0 to -1000 V

12 (700)

mrad (µm at tip) ± 20 %

A4

** Open loop resolution £

0.2 (7)

µrad (nm at tip)

C0

Stiffness (in operating direction)

0.13 (at tip)

N/µm ± 20 %

D1

Push/pull force capacity
(in operating direction)

80/10

N

D3

Electrical capacitance

290

nF ± 20 %

F1

* Dynamic operating current
coefficient (DOCC)

30
[0.5 /Hz x µm at tip]

µA/(Hz x mrad)

F2

Unloaded resonant frequency

380

Hz ± 20 %

G2

Operating temperature range

- 40 to 80

° C

H2

Voltage connection

VH

 

J1

Weight (with cables)

195

g ± 5 %

 

Body material

N-S

 

L

Recommended Amplifier/Controller

B, I

 

M

 

* Dynamic Operating Current Coefficient in µA per Hertz and mrad (µm).
Example: Sinusoidal scan of 10 mrad at 10 Hz requires approximately 3 mA drive current.

** Noise equivalent motion with E-507 amplifier.

 

Related Products and Additional Resources

This is a legacy product that may have limited availability or may have been replaced. Ask a PI engineer for an equivalent new model.

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