Products - PI (Physik Instrumente) L.P.
V-781 Ultra-High-Precision XY Stage Family
The V-781 XY Stage family sets a new standard for precision, stability, and ease of integration in high-performance motion systems. Designed as a monolithic XY stage rather than a stacked configuration of individual stages, the V-781 offers enhanced straightness, reduced yaw, and superior geometric stability—all in a lower-profile format. Ideal for demanding applications in semiconductor, photonics, and metrology environments, these stages combine direct-drive dynamics, crossed roller bearings, and nanometer-class encoder feedback to ensure long-lasting accuracy and reliability.
Key Features
- 110x110mm, 210x210mm and 310x310mm travel ranges
- Crossed roller bearings for ultra-smooth motion with superior load and moment capacity
- Direct measuring linear encoders with resolution to 1nm
- High acceleration (up to 1g) and velocity (up to 1m/s)
- Absolute encoder option eliminates the need for homing, enhancing start-up safety and operational efficiency
- Monolithic XY design eliminates misalignment issues common with stacked axes
- Optimized for maximum precision and stiffness, up to 50kg load capacity
- Lower profile with a wider bearing base for improved motion straightness and reduced pitch/yaw errors
- Ironless direct-drive 3-phase linear motors, for cogging-free, friction-free and backlash-free motion
- Long service life and minimal maintenance, ideal for 24/7 industrial use
- Pre-lubricated for lifetime performance
Performance & Integration
The V-781 delivers bidirectional repeatability of ±70 nm and excellent geometric precision in flatness, straightness, pitch, and yaw. Whether in semiconductor wafer inspection, metrology or micro-assembly, this stage excels where sub-micron precision and dynamic response are critical. For the ultimate precision and dynamic performance, V-781 stages are paired with PI’s A-81x series EtherCAT®-based motion controllers.
These controllers support:
- Multi-axis synchronization
- Optional Advanced PILOT algorithms to boost dynamics and stability while reducing motor current
- Compatibility with third-party EtherCAT® equipment
Accessories and Options
- Encoder type – 1Vpp Sin/Cos or absolute BiSS output
- Multi-axis, ACS motion controllers and servo drives, integrated or distributed
- Cables compatible with the A-8xx series, ACS-powered controllers.
- Multi-axis XYZ-stage assemblies
- Granite support base
Applications
The V-781 family is purpose-built for industries that demand nanometer-level precision and robust performance under continuous use:
- Semiconductor wafer test and inspection
- Laser micro-processing and beam steering
- Photonics alignment and fiber array packaging
- Surface metrology and profilometry
- Biotechnology and life science automation
- Precision micro-assembly and device packaging
- General-purpose high-throughput automation
Why Choose V-781 XY Stages?
Engineered for demanding precision motion and automation applications, the V-781 XY Stage Family combines best-in-class mechanics, direct-drive dynamics, and smart controller integration. For mission-critical applications that demand extreme accuracy, long-term reliability, and high throughput, the V-781 delivers.
For more information download the » V-781 XY Stage Datasheet
